EIGEMBox - SECS GEM for legacy equipment

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Patented Plug & Play SECS/GEM Solutions for Legacy Equipment

Successfully implemented on 80+ Equipments

EIGEMBox Solution

EIGEMBox is a plug-and-play solution that adds SECS/GEM, Modbus, or OPC capability to legacy semiconductor equipment—without any software or hardware installation on the tool itself. By simply connecting the equipment’s display cable (VGA, DVI, or HDMI) and optionally the keyboard/mouse ports (USB or PS/2), EIGEMBox enables full host communication and remote control. It has been successfully used in various scenarios, including enhancing SECS/GEM communication with full parameter exchange and reduced latency, enabling AMHS (E84/E87) integration in 200MM fabs, and extracting non-standard data beyond traditional SECS/GEM limitations to support advanced monitoring and automation.

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Equipment Upgraded with EIGEMBox

This is a partial list of equipment that has been upgraded For SECSGEM using EIGEMBox
For a Complete list Contact Us.

Partial Equipment List - FAB

KLA Surfscan
Varian 3290
Takatori
Ebara
Plasma Therm
MRC Eclipse
KLA Therma-wave
Sidea PT-903
CDE Resmap
Accretech PG300RM
TEL Alpha 8 SE
ASM E2000
SPTS
Hitachi M-511AE

EIGEMBOX - Datasheet Supported Equipment List

Partial Equipment List - Assembly & Packaging

Disco 651/641
Blue M Oven
Towa Y1
Asterion
Budatec
Orthodyne
Essentec Fox & Paraguda
Takatori ATM 8200A
ASM AD898
Ismeca SL
Hexa Max
Centrotherm CP6202

EIGEMBOX - Datasheet Supported Equipment List

Key Features

Full SECS/GEM Compliance

Supports SEMI E30, GEM300, and E84/E87 for seamless equipment integration.

Plug-and-Play Setup

No equipment changes needed. Quick setup in minutes using EIGEMBox.

Real-Time Monitoring & Control

Live data collection, remote start/stop, and automated recipe management.

Advanced Data Extraction

Captures wafer maps, trends, and screen data for better insights.

Multi-Protocol Support

Works with SECS/GEM, OPC, Modbus, MES, SCADA, PLC, and AMHS systems.

Why Choose EIGEMBox

Zero-Risk Deployment

Non-intrusive setup with no impact on equipment performance or warranty.

Proven on 80+ Tools

Successfully used across multiple semiconductor equipment types.

No OEM Dependency

No licenses, upgrades, or OEM support required.

Fast Deployment

Install in minutes. Get data instantly.

Cost-Effective Solution

Avoid expensive replacements. Extend equipment life with SECS/GEM integration.

Upgrade legacy tools with full SECS/GEM and GEM300 compliance

Upgrade Legacy Equipment with SECS/GEM and GEM300 Compliance
Modernize semiconductor tools and enable seamless factory automation and equipment connectivity.

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EIGEMBox Benefits

Cost Savings & Extended Asset Life

Avoid costly upgrades ($200K–$1M+). Extend equipment life by 5–10+ years at a lower cost.

Faster Industry 4.0 Adoption

Enable real-time monitoring, predictive maintenance, and automation in weeks—not years.

Improved Productivity & Quality

Reduce manual errors, speed up processes, and improve OEE by 5–15%.

Zero-Risk Operation

No impact on equipment performance. No crashes, no delays, no warranty issues.

Supported SEMI Standards

SEMI E30

Complete implementation including equipment constants, status variables, collection events, alarms, remote commands, process programs, terminal services, and trace data collection.

SEMI E84

Full E84 protocol for AMHS integration, enabling automated load port communication, carrier presence detection, placement verification, and access mode control.

SEMI E87

Carrier ID reading, substrate location data, slot map management, and carrier association for complete substrate tracking and automated material handling.

SEMI E94

Control job management for substrate processing tracking and material movement commands, integrating legacy equipment into modern MES workflows.

SEMI E40

SEMI E40 is a SEMI standard that defines the Process Job Management (PJM) model for semiconductor manufacturing equipment. It enables standardized creation, control, execution, and tracking of process jobs, improving automation, traceability, and integration between equipment and factory host systems.

Technical Specifications

Source Protocol	Conversion Capability
Video Input	VGA, DVI, HDMI supporting resolutions 640×480 to 1920×1080 at 60Hz standard refresh rates.
Input Monitoring	USB 2.0/3.0 and PS/2 keyboard/mouse with pass-through architecture.
Network	Gigabit Ethernet with VLAN support and standard RJ45 connectors.
Protocol Support	SECS/GEM (SEMI E30) via HSMS, E84/E87 for AMHS, OPC Classic and UA, Modbus TCP and RTU.
Performance	Less than One-second update frequency for real-time monitoring
OS Independence	Works with DOS, Windows 3.1/NT/XP/7/10.11 Linux, Unix, Solaris, VxWorks, QNX, or proprietary systems.

How it Works

Physical Connection

Connect EIGEMBox to the equipment display output using standard video cables. Optionally connect keyboard/mouse through pass-through ports.

Capture and Interpret

EIGEMBox continuously captures video frames, applying image processing to extract information. The system recognizes text using OCR, identifies status indicators through pattern matching, detects alarms from visual cues, and tracks keyboard/mouse interactions.

Convert and Expose

Extracted data flows into protocol conversion engines, transforming visual information into SECS/GEM, OPC, and Modbus formats. The SECS/GEM engine generates collection events, maintains status variables, creates alarm messages, and processes remote commands.

Host Communication

Converted data becomes available to MES, AMHS, and factory automation systems through standard protocols enabling equipment status queries, event subscriptions, remote recipe download, start/stop commands, remote display viewing, and AMHS integration.

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Frequently Asked Questions.

What is EIGEMBox?

EIGEMBox is a plug-and-play SECS/GEM communication hardware and software solution that enables semiconductor or FPD equipment to connect seamlessly with factory host systems.

Which SEMI standards does EIGEMBox support?

EIGEMBox fully supports SEMI E30, E37, E5, and E4 standards, ensuring complete GEM and SECS-II compliance for reliable equipment-to-host communication.

Can EIGEMBox be integrated with older or legacy equipment?

Yes. EIGEMBox is designed to retrofit older tools that do not have built-in SECS/GEM communication, allowing them to meet modern factory automation requirements.

Is EIGEMBox compatible with GEM300 or 300mm equipment?

Yes. EIGEMBox can be configured to support GEM300 communication standards, including SEMI E87, E90, E94, and E116, for 300mm wafer handling systems.

What are the benefits of using EIGEMBox for SECS/GEM communication?

EIGEMBox simplifies integration, accelerates SECS/GEM compliance, reduces development time, and ensures stable and reliable host communication with Tier-1 semiconductor fabs worldwide.

Does eInnoSys provide support and installation services for EIGEMBox?

Yes. eInnoSys provides full implementation, testing, and certification support to ensure your equipment meets SECS/GEM compliance requirements.

Can EIGEMBox connect with OHT, AGV, or RGV systems?

Yes. When combined with E84 I/O modules, EIGEMBox enables communication with material handling systems such as OHT, AGV, and RGV for automated lot delivery.

Does EIGEMBox require any software installation on my equipment?

No. EIGEMBox is fully plug-and-play and requires zero software or hardware installation on the equipment itself. It connects only to the display output (VGA/DVI/HDMI) and optionally to keyboard and mouse ports. The equipment controller is never modified and continues operating exactly as designed, with no firmware updates, drivers, or software agents required.

Will EIGEMBox cause any side effects like slowdowns or crashes on my equipment?

No. EIGEMBox never touches the equipment controller and connects only through external display and input ports. As a result, there are no side effects, crashes, performance impact, timing issues, or interference with normal equipment operation. The tool behaves exactly as it always has.

What types of equipment can EIGEMBox work with?

EIGEMBox works with virtually any semiconductor equipment that has a display output, regardless of manufacturer, age, or operating system. It has been deployed across 80+ tools worldwide, including metrology (KLA, Therma-wave), deposition (ASM, MRC), etch (Plasma-Therm, SPTS), ion implantation (Varian), and material-handling systems (Takatori). Equipment running DOS, Windows 3.1, Linux, Solaris, or proprietary systems is fully supported.

Do I need permission or support from the original equipment manufacturer (OEM)?

No. EIGEMBox requires no OEM licenses, upgrade kits, support contracts, or permissions. This is especially valuable for tools whose manufacturers have merged, been acquired, or no longer exist. You retain full control over integration and deployment, without dependency on OEM.

How long does installation and setup take?

Physical installation takes about hours per tool complexity, involving simple video and optional keyboard/mouse connections. Initial configuration through the EIGEMBox web interface typically takes several hours to 1–2 days, depending on the complexity of the equipment and the data requirements. Most customers begin collecting real-time data and communicating with their MES within days, not months.

EIGEMBox – SECS/GEM for Old/Legacy Equipment